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Alumina measurement .pdf



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Thin Film Measurement solution
Software, sensors, custom development
and integration

Aluminum oxide and ALON measurement

Aluminum oxide (alumina) is widely used as a protective coating in various
applications.
Optical properties of alumina depend on the deposition conditions. Both thickness and
optical constants of the alumina can be measured accurately using MProbe system.
Below are several examples of alumina & ALON measurement.

1. Example 1 Alumina on glass slide
MProbe Vis system (400-1000nm wavelength range) was used for this measurement.

Fig. 1 Results of the alumina on glass measurement. Fit of the model to measured data.
Thickness and R.I. of alumina are determined. Thickness: 1202nm (R.I. see Fig. 2)

83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

Fig. 2. Measured R.I. of alumina (yellow) compared to a standard library alumina (red)

83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

2. Example 2. Yttrium oxide/alumina on quartz substrate
MProbe Vis system (400-1000nm wavelength range) was used for this measurement.

Fig. 3. Results of the Y2O3/Alumina/Quartz measurement. Fit of the model to measured
data. Thickness Y2O3: 2535nm , Alumina: 938 nm

83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

3. Example 3. ALON/alumina on quartz
MProbe VisHR system (700-1000nm wavelength range) was used for this
measurement.

Fig. 4. Raw reflectance spectrum of the ALON/Alumina/quartz sample

Fig. 5. Results of the measurement: ALON thickness-32 μm,
Alumina thickness - 5.4 μm (additional interface layer 2.3 μm is also visible). Peak
positions indicate layer thicknesses.
83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com


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