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Thin Film Thickness 18 Feb .pdf



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Thin Film Measurement solution
Software, sensors, custom development
and integration

TOUCHSCREEN: EMULSION LAYER MEASUREMENT
Touchscreen module manufacturing starts with a wire-grid placed on a conductive
polymer. Anti-etch emulsion is deposited on top of the wiregrid.

Fig.1. Wire grid with emulsion and subsequent silver paste printing and etching.
The thickness of the emulsion needs to be measured for quality control, before the silver
paste printing step. The screen is soft and semi-transparent; it requires a non-contact and
fast approach for thickness measurement.
MProbeHR-MSP systems (700-1100nm wavelength range) is well suited for this
application for following reasons:
1. It uses spectroscopic reflectance – a non-contact optical methods
2. Measurement time < 1s (including data analysis)
3. Using 700-1100nm range excludes the effect of the material color (green color in
this case) and reduce the effect of light scattering which maybe present at shorted
wavelengths
4. Different measurement spot sizes (depending on selected objective) enable to
select a proper measurement location.
Measurement Summary
MProbeHR-MSP system (700-1100nm wavelength range) was used to measure a
touch panel sample. The sample was semi-transparent and had an emulsion/polymer
deposited on a fine metal grid (290 lines/inch). The thickness of the emulsion/polymer
was found to be ~ 15µm. The refractive index of 1.6 was used for the emulsion material.
First the measurement was done using ~ 1 mm measurement spot size. It was
found that within this area there are several thicknesses: 1.8 µm, 15 µm and 27 µm. The
second measurement was done with the smaller spot size ~ 20 µm spot size that was
positioned on the emulsion (dark) area. This measurement gave only 15 µm thickness
reading. Measurements were done in the central area of the sample. Thick film algorithm
(based on FFT) was used to determine the thickness of the films.
83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

Fig. 2. Sample from the emulsion side.

Fig. 3. Sample under 20x magnification.
83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

Table 1. Measurement results

Measurement
point
Point 1
Point 2
Point 3
Point 4
Point 5

Emulsion
thickness, µm
15.7
15.3
16.2
14.9
15.2

*Substrate thickness, µm

Comment

27.4
26.8
27.8
N/A
N/A

1 mm spot
1 mm spot
1 mm spot
20 µm spot
20 µm spot

* Absolute thickness value of substrate maybe not accurate because substrate
refractive index was assumed 1.6 (the real R.I. is different)

DETAILS.
1. Large spot measurement.

Fig.4 Measured reflectance spectrum (point 1)

83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

Fig. 5 Point 1 measurement - results of the data analysis. Peaks position correspond to
the thicknesses: 1.8 µm (interface), 15.7 µm(emulsion) and 27.4 µm(substrate)

2. Small spot measurement (20 um)

Fig. 6. Point 5 (20 µm spot size) reflectance spectrum.
83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com

Fig. 7. Point 5 (20 µm spot size) measurement results. Peak position correspond to the
emulsion film thickness of 15.2 µm

83 Pine Hill Rd. Southborough, MA 01772
Phone +1.617.388.6832 Fax. +1.508.858.5473
email: info@semiconsoft.com http://www.semiconsoft.com


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